High-aspect-ratio photolithography for MEMS applicationsMIYAJIMA, H; MEHREGANY, M.Journal of microelectromechanical systems. 1995, Vol 4, Num 4, pp 220-229, issn 1057-7157Article

A study of residual stress distribution through the thickness of p⁺ silicon filmsWEN-HWA CHU; MEHREGANY, M.I.E.E.E. transactions on electron devices. 1993, Vol 40, Num 7, pp 1245-1250, issn 0018-9383Article

Surface roughness of LPCVD polysilicon and its influence on overlying electroless plated nickelROY, S; FURUKAWA, S; MEHREGANY, M et al.Journal of the Electrochemical Society. 1997, Vol 144, Num 10, pp 3589-3592, issn 0013-4651Article

Chemical-mechanical polishing for polysilicon surface micromachiningYASSEEN, A. A; MOURLAS, N. J; MEHREGANY, M et al.Journal of the Electrochemical Society. 1997, Vol 144, Num 1, pp 237-242, issn 0013-4651Article

Microfabricated shear stress sensors, Part 2 : Testing and calibrationDANHYMAN; TAO PAN; RESHOTKO, E et al.AIAA journal. 1999, Vol 37, Num 1, pp 73-78, issn 0001-1452Article

Thick glass film technology for polysilicon surface micromachiningAZZAM YASSEEN, A; CAWLEY, J. D; MEHREGANY, M et al.Journal of microelectromechanical systems. 1999, Vol 8, Num 2, pp 172-179, issn 1057-7157Article

MEMS applications in aerodynamic measurement technologyRESHOTKO, E; MEHREGANY, M; BANG, C et al.AGARD conference proceedings. 1998, issn 0549-7191, isbn 92-836-0056-8, 10 p.Conference Paper

Measurement of wear in polysilicon micromotorsMEHREGANY, M; SENTURIA, S. D; LANG, J. H et al.I.E.E.E. transactions on electron devices. 1992, Vol 39, Num 5, pp 1136-1143, issn 0018-9383Article

Deposition and properties of polycrystalline β-SiC films using LPCVD with different dopant amountNOH, S; FU, X; CHEN, L et al.Electronics Letters. 2006, Vol 42, Num 13, pp 775-777, issn 0013-5194, 3 p.Article

Mechanical integrity of polysilicon films exposed to hydrofluoric acid solutionsWALKER, J. A; GABRIEL, K. J; MEHREGANY, M et al.Journal of electronic materials. 1991, Vol 20, Num 9, pp 665-670, issn 0361-5235Article

Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO₂ and polysiliconYASSEEN, A. A; ZORMAN, C. A; MEHREGANY, M et al.Journal of microelectromechanical systems. 1999, Vol 8, Num 3, pp 237-242, issn 1057-7157Article

Hybrid-integrated laser-diode micro-external mirror fabricated by (110) silicon micromachiningUENISHI, Y; TSUGAI, M; MEHREGANY, M et al.Electronics Letters. 1995, Vol 31, Num 12, pp 965-966, issn 0013-5194Article

Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurriesAZZAM YASSEEN, A; ZORMAN, C. A; MEHREGANY, M et al.Journal of the Electrochemical Society. 1999, Vol 146, Num 1, pp 327-330, issn 0013-4651Article

Determination of Young's modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining processROY, S; FURUKAWA, S; MEHREGANY, M et al.Microsystem technologies. 1996, Vol 2, Num 2, pp 92-96, issn 0946-7076Article

Mechanical properties of 3C silicon carbideLIJUN TONG; MEHREGANY, M; MATUS, L. G et al.Applied physics letters. 1992, Vol 60, Num 24, pp 2992-2994, issn 0003-6951Article

Silicon carbide for microelectromechanical systemsMEHREGANY, M; ZORMAN, C. A; ROY, S et al.International materials reviews. 2000, Vol 45, Num 3, pp 85-108, issn 0950-6608Article

Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine enginesRAJAN, N; MEHREGANY, M; ZORMAN, C. A et al.Journal of microelectromechanical systems. 1999, Vol 8, Num 3, pp 251-257, issn 1057-7157Article

Pendeo-epitaxial growth of gallium nitride on silicon substratesGEHRKE, T; LINTHICUM, K. J; PREBLE, E et al.Journal of electronic materials. 2000, Vol 29, Num 3, pp 306-310, issn 0361-5235Article

Fabrication of low defect density 3C-SiC on SiO₂ structures using wafer bonding techniquesVINOD, K. N; ZORMAN, C. A; YASSEEN, A. A et al.Journal of electronic materials. 1998, Vol 27, Num 3, pp L17-L20, issn 0361-5235Article

Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizersRAJAN, N; ZORMAN, C. A; MEHREGANY, M et al.Surface & coatings technology. 1998, Vol 108-09, Num 1-3, pp 391-397, issn 0257-8972Conference Paper

Detection and measurement of ice thickness using microprocessor-controlled resonant transducersROY, S; IZAD, A; DEANNA, R et al.SPIE proceedings series. 1998, pp 10-20, isbn 0-8194-2773-X, 2VolConference Paper

Micromotor fabricationMEHREGANY, M; SENTURIA, S. D; LANG, J. H et al.I.E.E.E. transactions on electron devices. 1992, Vol 39, Num 9, pp 2060-2069, issn 0018-9383Article

Stacking rearrangement at 6H-SiC(0 0 0 1) surfaces during thermal hydrogenationSEYLLER, Th; SIEBER, N; STARK, T et al.Surface science. 2003, Vol 532-35, pp 698-704, issn 0039-6028, 7 p.Conference Paper

A capacitive ice detection microsensorROY, S; DEANNA, R. G; MEHREGANY, M et al.Sensors and materials. 2000, Vol 12, Num 1, pp 1-14, issn 0914-4935Article

Microfabricated ice-detection sensorDEANNA, R. G; MEHREGANY, M; ROY, S et al.SPIE proceedings series. 1997, pp 42-51, isbn 0-8194-2459-5Conference Paper